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Ακαδημαϊκή Έρευνα και Εκπαίδευση
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Author/Creator: Wagner, M.
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Now showing items 1-1 of 1
1
Line-width roughness analysis of EUV resists after development in homogenous CO2 solutions using CO2 compatible salts (CCS) by a three-parameter model
Author/Creator:
Κωνσταντούδης, Βασίλειος
;
Γογγολίδης, Ευάγγελος
;
Πάτσης, Γεώργιος
;
Wagner, M.
;
DeYoung, J.
Publication Date:
2006-04-11
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1
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conferenceItem (Conference presentation) (1)
Author/Creator
DeYoung, J.
Wagner, M.
Γογγολίδης, Ευάγγελος
Κωνσταντούδης, Βασίλειος
Πάτσης, Γεώργιος
Date
2006
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