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Ακαδημαϊκή Έρευνα και Εκπαίδευση
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Date: 1990 - 1999
Author/Creator: Gentili, Monica
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Now showing items 1-2 of 2
1
Application of a reaction‐diffusion model for negative chemically amplified resists to determine electron‐beam proximity correction parameters
Author/Creator:
Γλέζος, Νίκος
;
Πάτσης, Γεώργιος
;
Ράπτης, Ιωάννης
;
Αργείτης, Παναγιώτης
;
Gentili, Monica
Publication Date:
1996-08-12
Simulation of chemically amplified resist processes for 150 nm e-beam lithography
Author/Creator:
Rosenbusch, Anja
;
Cui, Zheng
;
Di Fabrizio, Enzo
;
Gentili, Monica
;
Γλέζος, Νίκος
Publication Date:
1999-05
Now showing items 1-2 of 2
1
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journalArticle (Journal article) (2)
Author/Creator
Gentili, Monica
Γλέζος, Νίκος
Cui, Zheng
Di Fabrizio, Enzo
Rosenbusch, Anja
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Journal Name
Journal of Vacuum Science & Technology B
Microelectronic Engineering
Date
1999
1996
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