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Ακαδημαϊκή Έρευνα και Εκπαίδευση
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Date: 1990 - 1999
Date: 1998
Author/Creator: Cui, Zheng
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Now showing items 1-1 of 1
1
E-beam proximity correction for negative tone chemically amplified resists taking into account post-bake effects
Author/Creator:
Γλέζος, Νίκος
;
Πάτσης, Γεώργιος
;
Rosenbusch, Anja
;
Cui, Zheng
Publication Date:
1998-03
Now showing items 1-1 of 1
1
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journalArticle (Journal article) (1)
Author/Creator
Cui, Zheng
Rosenbusch, Anja
Γλέζος, Νίκος
Πάτσης, Γεώργιος
Journal Name
Microelectronic Engineering
Date
1998
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