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Date: 1990 - 1999
Date: 1998
Author/Creator: Meneghini, Giancarlo
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Now showing items 1-2 of 2
1
Electron beam lithography on multilayer substrates
Author/Creator:
Ράπτης, Ιωάννης Α.
;
Meneghini, Giancarlo
;
Rosenbusch, Anja
;
Γλέζος, Νίκος Μ.
;
Palumbo, Rafaelle
Publication Date:
1998
Calculation of energy deposition in thin resist films over multilayer substrates
Author/Creator:
Πάτσης, Γεώργιος
;
Meneghini, Giancarlo
;
Γλέζος, Νίκος
;
Αργείτης, Παναγιώτης
Publication Date:
1998-03
Now showing items 1-2 of 2
1
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Meneghini, Giancarlo
Palumbo, Rafaelle
Rosenbusch, Anja
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Journal Name
Microelectronic Engineering
Date
1998
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