Conference Name:23rd International Conference on Microelectronics, MIEL 2002
This paper reports a multipurpose thermal sensor based on Seebeck effect designed and fabricated in IHTM-IMTM, Belgrade. Presented experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter. Characterization of the device for the two implementations was performed at IMTM and IMEL-NCSR "Demokritos", respectively. Obtained results for flow measurement were compared with the performance of the gas flow sensor developed in IMEL.