Performance simulation, realization and evaluation of capacitive sensor arrays for the real time detection of volatile organic compounds

dc.contributor.author	Οικονόμου, Π.	el
dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Μποτσιαλάς, Α.	el
dc.contributor.author	Μανώλη, Κ.	el
dc.contributor.author	Γουστουρίδης, Δ.	el
dc.date.accessioned	2015-05-16T15:54:53Z
dc.date.available	2015-05-16T15:54:53Z
dc.date.issued	2015-05-16
dc.identifier.uri	http://hdl.handle.net/11400/10539
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.sciencedirect.com	en
dc.subject	Gas sensor
dc.subject	Microfabrication
dc.subject	Αισθητήρας αερίου
dc.subject	Μικροκατασκευαστική
dc.title	Performance simulation, realization and evaluation of capacitive sensor arrays for the real time detection of volatile organic compounds	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.contributorName	Πανταζής, Ν.	el
heal.contributorName	Καββαδίας, Α.	el
heal.contributorName	Βαλαμόντες, Ευάγγελος	el
heal.contributorName	Γκανέτσος, Θ.	el
heal.contributorName	Σανοπούλου, Μ.	el
heal.contributorName	Ράπτης, Ιωάννης	el
heal.identifier.secondary	DOI: 10.1016/j.mee.2011.02.085
heal.language	en
heal.access	campus
heal.publicationDate	2011-08
heal.bibliographicCitation	Oikonomou, P., Patsis, G., Botsialas, A., Manoli, K., Goustouridis, D. et al. (2011) Performance simulation, realization and evaluation of capacitive sensor arrays for the real time detection of volatile organic compounds. "Microelectronic Engineering", 88 (8), p. 2359–2363	en
heal.abstract	Capacitive-type gas sensors rely on changes in the dielectric properties of the sensing polymeric layer due to absorption of Volatile Organic Compounds (VOCs) or moisture. They are promising devices in terms of ease and low cost of fabrication, reversibility and the wide range of sensing material choice. In the present work, the aim is to explore the fabrication issues of the InterDigitated Electrodes (IDE) through a generic simulation model for the prediction of the capacitance of various IDE structures. Based on the simulation results, an IDE layout was selected for the realization and evaluation of chemcapacitor arrays in the presence of different humidity levels and low concentrations of VOCs with dielectric constant close to those of polymers. The extracted results will be further exploited for the fabrication optimization of an InterDigitated Capacitor (IDC) layout with increased selectivity and sensitivity in specific applications.	en
heal.publisher	Elsevier	en
heal.journalName	Microelectronic Engineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false