Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking

dc.contributor.author	Fuhrmann, Andreas	el
dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Fiebach, Andre	en
dc.date.accessioned	2015-05-16T23:48:17Z
dc.date.issued	2015-05-17
dc.identifier.uri	http://hdl.handle.net/11400/10564
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	spiedigitallibrary.org	en
dc.source	http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=756355	en
dc.subject	Diffusion
dc.subject	Διάχυση
dc.subject	Μακροσκοπικές προσεγγίσεις
dc.subject	Στοχαστικές προσεγγίσεις
dc.title	Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking	en
heal.type	conferenceItem
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: http://dx.doi.org/10.1117/12.846491
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2010-02-21
heal.bibliographicCitation	Fuhrmann, J., Fiebach, A. and Patsis, G. (2010) Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking. In Advances in Resist Materials and Processing Technology XXVII. 21st February 2010. San Jose	en
heal.abstract	Pattern doubling by cross-linking of a spacer triggered by residual acid diffusion from a previously developed primary structure into the spacer is a possible option to create structure widths below the nominal resolution of the optical process. An advantage of such a process step would be the self-alignment to the primary structure, which would render a second exposure step unnecessary. Using macroscopic and stochastic modeling approaches, we demonstrate that it may be possible to control the width of the secondary structure created by cross-linking by the amount of quencher base added.	en
heal.fullTextAvailability	false
heal.conferenceName	Advances in Resist Materials and Processing Technology XXVII	en
heal.conferenceItemType	poster