Analytical modelling of thermopile based flow sensor and verification with experimental results

dc.contributor.author	Randjelović, Danijela V.	en
dc.contributor.author	Djurić, Zoran	en
dc.contributor.author	Πετρόπουλος, Αναστάσιος	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Lazić, Žarko	en
dc.date.accessioned	2015-05-17T09:33:26Z
dc.date.available	2015-05-17T09:33:26Z
dc.date.issued	2015-05-17
dc.identifier.uri	http://hdl.handle.net/11400/10576
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.sciencedirect.com/science/article/pii/S0167931708006205	el
dc.subject	Flow sensor
dc.subject	Thermopile
dc.subject	Αισθητήρας ροής
dc.subject	Θερμοπύλες
dc.title	Analytical modelling of thermopile based flow sensor and verification with experimental results	en
heal.type	journalArticle
heal.generalDescription	MNE ’08 — The 34th International Conference on Micro- and Nano-Engineering (MNE)	en
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://zbw.eu/stw/descriptor/10470-6
heal.classificationURI	http://zbw.eu/stw/descriptor/10455-2
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.contributorName	Popović, Mirjana	en
heal.identifier.secondary	doi:10.1016/j.mee.2008.12.004
heal.language	en
heal.access	campus
heal.recordProvider	Τ.Ε.Ι. Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ηλεκτρονικών Μηχανικών Τ.Ε.	el
heal.publicationDate	2009
heal.bibliographicCitation	Randjelovića, D., Djurića, Z., Petropoulos, A., Kaltsas, G., Lazić, Z., et al. (April-June 2009). Analytical modelling of thermopile based flow sensor and verification with experimental results. Microelectronic Engineering. 86(4-6). pp. 1293-1296. Elsevier B.V: 2009. Available from: http://www.sciencedirect.com/science/article/pii/S0167931708006205 [Accessed 13/12/2008]	en
heal.abstract	A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p+Si/Al thermocouples each, and a “U” shaped p+Si heater. Thermally isolating membrane was formed of sputtered SiO2 and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions.	en
heal.publisher	Elsevier B.V.	en
heal.journalName	Microelectronic Engineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true