Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers

dc.contributor.author	Βαλαμόντες, Ευάγγελος Σ.	el
dc.contributor.author	Σταθαράς, Ιωάννης Χ.	el
dc.contributor.author	Νομικός, Κωνσταντίνος Δ.	el
dc.date.accessioned	2015-05-17T19:56:46Z
dc.date.available	2015-05-17T19:56:46Z
dc.date.issued	2015-05-17
dc.identifier.uri	http://hdl.handle.net/11400/10624
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.elsevier.com	en
dc.subject	Electron probe microanalysis
dc.subject	Fluorescence microscopy
dc.subject	Scanning electron microscopy
dc.subject	Μικροανάλυση ανιχνευτή ηλεκτρονίων
dc.subject	Μικροσκόπιο φθορισμού
dc.subject	Σάρωση ηλεκτρονικής μικροσκοπίας
dc.title	Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85042233
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85049410
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh91002757
heal.identifier.secondary	DOI: 10.1016/j.nimb.2007.03.089
heal.language	en
heal.access	campus
heal.publicationDate	2007-07
heal.bibliographicCitation	VALAMONTES, E.S., STATHARAS, I.C. & NOMICOS, C.D. (2007). Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. [online] 260 (2). p. 628-632. Available from: http://www.elsevier.com/[Accessed 07/04/2007]	en
heal.abstract	In this paper, we used back-foil scanning X-ray microfluorescence (SXRF) and we examined the sensitivity of the technique for the analysis of very thin overlayers, where electron probe X-ray microanalysis (EPMA) reaches its detection limits. The lateral resolution of back-foil SXRF is also calculated for all the systems used. Both experimental results and Monte-Carlo calculations are used in this respect. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The lateral resolution of back-foil SXRF is of the order of some micrometers. This is much better than the lateral resolution in conventional XRF and of the same order of magnitude as in EPMA.	en
heal.publisher	Elsevier	en
heal.journalName	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true