Proton beam micromachined buried microchannels in negative tone resist materials

dc.contributor.author	Rajta, István	en
dc.contributor.author	Χατζηχρηστίδη, Μαργαρίτα	el
dc.contributor.author	Baradács, Eszter	en
dc.contributor.author	Cserháti, Csaba S.	en
dc.contributor.author	Ράπτης, Ιωάννης Α.	el
dc.date.accessioned	2015-05-17T20:10:05Z
dc.date.available	2015-05-17T20:10:05Z
dc.date.issued	2015-05-17
dc.identifier.uri	http://hdl.handle.net/11400/10625
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.elsevier.com	en
dc.subject	Aspect ratio
dc.subject	Goniometers
dc.subject	Micromachining
dc.subject	Proton beams
dc.subject	Surface structure
dc.subject	Αναλογία διαστάσεων
dc.subject	Γωνιόμετρα
dc.subject	Μικρομηχανική
dc.subject	Δέσμες πρωτονίων
dc.subject	Επιφανειακή δομή
dc.title	Proton beam micromachined buried microchannels in negative tone resist materials	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh2003003008
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh96011311
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85107787
heal.contributorName	Μανώλη, Κυριακή	el
heal.contributorName	Βαλαμόντες, Ευάγγελος Σ.	el
heal.identifier.secondary	DOI: 10.1016/j.nimb.2007.02.055
heal.language	en
heal.access	campus
heal.publicationDate	2007-07
heal.bibliographicCitation	RAJTA, I., CHATZICHRISTIDI, M., BARADACS, E., CSERHATI, C.S., RAPTIS, I.A., et al. (2007). Proton beam micromachined buried microchannels in negative tone resist materials. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. [online] 260 (1). p. 414-418. Available from: http://www.elsevier.com/[Accessed 14/02/2007]	en
heal.abstract	In the present work the Atomki, Debrecen microprobe facility has been used to write long tilted structures by 2 MeV protons. For the formation of the structures, two exposures have been carried out at +20° and -20° using a goniometer stage sample holder. The tilted structures were resolved in the negative tone resist materials SU-8 and ADEPR (an aqueous base developable chemically amplified resist). The length of the microchannels was varied between 100 μm and 1000 μm, the wall thickness was less than 10 μm. By applying the developed methodology it was possible to resolve the desired layout through the whole length of the channel.	en
heal.publisher	Elsevier	en
heal.journalName	Full Text(opens in a new window)\| Export \| Download \| More... Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true