Polymer based chemical sensor array fabricated with conventional microelectronic processes

dc.contributor.author	Κιτσαρά, Μαρία	el
dc.contributor.author	Γουστουρίδης, Δημήτριος	el
dc.contributor.author	Βαλαμόντες, Ευάγγελος Σ.	el
dc.contributor.author	Οικονόμου, Πέτρος	el
dc.contributor.author	Μπέλτσιος, Κωνσταντίνος Γ.	el
dc.date.accessioned	2015-05-18T15:51:43Z
dc.date.issued	2015-05-18
dc.identifier.uri	http://hdl.handle.net/11400/10666
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	Chemical sensors
dc.subject	Photolithography
dc.subject	Polymer deposition
dc.subject	Polymer swelling
dc.subject	Vapor sorption
dc.subject	Χημικοί αισθητήρες
dc.subject	Φωτολιθογραφία
dc.subject	Απόθεση πολυμερούς
dc.subject	Πολυμερές οίδημα
dc.subject	Προσρόφηση ατμών
dc.title	Polymer based chemical sensor array fabricated with conventional microelectronic processes	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.contributorName	Ράπτης, Ιωάννης Α.	el
heal.identifier.secondary	ISSN: 14544164
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2010-05
heal.bibliographicCitation	KITSARA, M., GOUSTOURIDIS, D., VALAMONTES, E.S., OIKONOMOU, P., BELTSIOS, K.G., et al. (2010). Polymer based chemical sensor array fabricated with conventional microelectronic processes. Microelectronic Engineering. 12 (5). p. 1147-1152.	en
heal.abstract	A polymer array fabricated on the same substrate with conventional microelectronic processes is introduced for gas sensing applications. The process is based on photolithographic processes and takes advantage of the balance between UV exposure dose, material tone and developers used. The sensing properties of the lithographically defined films in the array were characterized for various analytes through in situ monitoring of films swelling by white light reflectance spectroscopy. The sensing responses are post processed by Principal Component Analysis and the discrimination between analytes with similar and totally different analytes is presented.	en
heal.journalName	Journal of Optoelectronics and Advanced Materials	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false