Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications

dc.contributor.author	Μισιακός, Κωνσταντίνος	el
dc.contributor.author	Ράπτης, Ιωάννης Α.	el
dc.contributor.author	Γουστουρίδης, Δημήτριος	el
dc.contributor.author	Κιτσαρά, Μαρία	el
dc.contributor.author	Κοντοπανάγος, Χαράλαμπος Φ.	el
dc.date.accessioned	2015-05-18T16:24:27Z
dc.date.issued	2015-05-18
dc.identifier.uri	http://hdl.handle.net/11400/10672
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://ieeexplore.ieee.org/	en
dc.subject	Silicon
dc.subject	Polymer films
dc.subject	Organic compounds
dc.subject	Monolithic integrated circuits
dc.subject	Gas sensors
dc.subject	Πυρίτιο
dc.subject	Πολυμερές φιλμ
dc.subject	Οργανικές ενώσεις
dc.subject	Μονολιθικά ολοκληρωμένα κυκλώματα
dc.subject	Αισθητήρες φυσικού αερίου
dc.title	Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications	en
heal.type	conferenceItem
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.contributorName	Gerardino, Annamaria	it
heal.contributorName	Βαλαμόντες, Ευάγγελος Σ.	el
heal.identifier.secondary	DOI: 10.1109/ICSENS.2009.5398260
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2009
heal.bibliographicCitation	Misiakos, K., Raptis, I.A., Goustouridis, D., Kitsara, M., Contopanagos, H.F., et al. (2009) Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications, In: Proceedings of the IEEE Sensors 2009 Conference - SENSORS 2009. Christchurch, New Zealand. 25-28 October, 2009. [online]. p. 429-432, 5398260. http://ieeexplore.ieee.org/	en
heal.abstract	The cantilever based devices relying on optical beam steering, even though sensitive as sensors, have rather limited penetration to the market. The obstacle that has prevented so far the wider spread of such devices is the inability to monolithically integrate the photonic components on the same die with the cantilever. In this work, a novel microsystem is presented comprising integrated Si light sources and detectors self aligned to suspended Si 3N4 cantilevers, acting as waveguides, all monolithically integrated in the same Si chip through conventional microelectronics processing. The cantilever is coated with a polymeric film that selectively absorbs analyte molecules from the environment causing a change in the film stress and commensurate cantilever's deflection which is monitored as change in the photocurrent. The PMMA coated device showed detection of VOCs, in a wide concentration range from few tens of ppm, limited only by the physicochemical properties and the chemical affinity of the polymer used.	en
heal.publisher	IEEE	en
heal.fullTextAvailability	false
heal.conferenceName	IEEE Sensors 2009 Conference - SENSORS 2009	en
heal.conferenceItemType	poster