Comparison of back-foil SXRF and EPMA for the elemental characterization of thin coatings

dc.contributor.author	Βαλαμόντες, Ευάγγελος Σ.	el
dc.contributor.author	Σταθαράς, Ιωάννης Χ.	el
dc.date.accessioned	2015-05-18T18:05:38Z
dc.date.available	2015-05-18T18:05:38Z
dc.date.issued	2015-05-18
dc.identifier.uri	http://hdl.handle.net/11400/10688
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.elsevier.com	en
dc.subject	Thin films
dc.subject	X-ray microanalysis
dc.subject	X-ray microfluorescence
dc.subject	Λεπτές ταινίες
dc.subject	Μικροανάλυση ακτίνων Χ
dc.title	Comparison of back-foil SXRF and EPMA for the elemental characterization of thin coatings	en
heal.type	journalArticle
heal.generalDescription	7th International Conference on Electron Beam Technologies. Varna, Bulgaria. 2-5 June, 2003. Code 64318	en
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85148737
heal.identifier.secondary	DOI: 10.1016/j.vacuum.2004.11.002
heal.language	en
heal.access	campus
heal.publicationDate	2005-03-11
heal.bibliographicCitation	VALAMONTES, E.S. & STATHARAS, I.C. (2005). Comparison of back-foil SXRF and EPMA for the elemental characterization of thin coatings. Vacuum. [online] 77 (4). p. 371-376. Available from: http://www.elsevier.com/[Accessed 12/01/2005]	en
heal.abstract	Back-foil scanning X-ray microfluorescence (SXRF), developed in a scanning electron microscope and applied for the analysis of very thin coatings is compared with electron probe X-ray microanalysis (EPMA). Both experimental results and Monte-Carlo calculations are used in this respect. The signal to background ratio as a function of the primary electron beam energy and angle of incidence, and for different film thicknesses is obtained for both techniques and a comparative study of sensitivity is made. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The resolving power of back-foil SXRF is also calculated for the anode used by Monte-Carlo simulations.	en
heal.publisher	Elsevier	en
heal.journalName	Vacuum	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false