Material origins of line-edge roughness

dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Κωνσταντούδης, Βασίλειος	el
dc.contributor.author	Γογγολίδης, Ευάγγελος	el
dc.date.accessioned	2015-05-19T17:17:27Z
dc.date.issued	2015-05-19
dc.identifier.uri	http://hdl.handle.net/11400/10753
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://proceedings.spiedigitallibrary.org	en
dc.source	http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=841853	en
dc.subject	Polymerization
dc.subject	Surface roughness
dc.subject	LER
dc.subject	Πολυμερισμός
dc.subject	Τραχύτητα επιφάνειας
dc.title	Material origins of line-edge roughness	en
heal.type	conferenceItem
heal.secondaryTitle	Monte Carlo simulations and scaling analysis	en
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1117/12.535202
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2004-02-22
heal.bibliographicCitation	Patsis, G., Constantoudis, V. and Gogolides, E. (2004) Material origins of line-edge roughness: Monte Carlo simulations and scaling analysis. In Advances in Resist Technology and Processing XXI. 22nd February 2004. Santa Clara	en
heal.abstract	A fast 2D/3D resist dissolution algorithm is used to quantify line-edge roughness and determine its relation to resist material parameters, such as the polymerization length distribution, the end-to-end distance and the radius of gyration, along with the effects of acid-diffusion. The same relation between surface roughness and exposure dose known to hold experimentally is also shown to be valid for line-edge roughness. Increasing average polymerization length results in increased values of line-edge roughness, radius of gyration and end-to-end distance establishing an immediate relation between material properties and measured line-edge roughness (LER). The effects of the edge depth and length of measurement and of the free volume on LER vs. are also investigated.	en
heal.publisher	SPIE	en
heal.fullTextAvailability	false
heal.conferenceName	Advances in Resist Technology and Processing XXI	en
heal.conferenceItemType	poster