Probabilistic gel formation theory in negative tone chemically amplified resists used in optical and electron beam lithography

dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Γλέζος, Νίκος	el
dc.date.accessioned	2015-05-20T16:41:25Z
dc.date.available	2015-05-20T16:41:25Z
dc.date.issued	2015-05-20
dc.identifier.uri	http://hdl.handle.net/11400/10783
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://scitation.aip.org	en
dc.source	http://scitation.aip.org/content/avs/journal/jvstb/20/4/10.1116/1.1484099	en
dc.subject	Gels
dc.subject	Acids
dc.subject	Electron beams
dc.subject	Photolithography
dc.subject	Τζελ
dc.subject	Οξέα
dc.subject	Δέσμες ηλεκτρονίων
dc.subject	Φωτολιθογραφία
dc.title	Probabilistic gel formation theory in negative tone chemically amplified resists used in optical and electron beam lithography	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1116/1.1484099
heal.language	en
heal.access	campus
heal.publicationDate	2002-08-06
heal.bibliographicCitation	Patsis, G. and Glezos, N. (2002) Probabilistic gel formation theory in negative tone chemically amplified resists used in optical and electron beam lithography. "Journal of Vacuum Science & Technology B", 20 (4)	en
heal.abstract	In this article a probabilistic model able to describe gel formation in negative tone chemically amplified resists (CARs) is developed. This model is a continuation and development of previous work on polymer cross-linking and on gelation of negative tone nonchemically amplified resists. The relation between gel fraction and exposure dose in negative tone CARs is obtained. A new parameter called inhibition activity with a vital role in the quantification of the cage effect (i.e., acid species trapping) is analyzed. The description of cage effect evolution with exposure dose, postexposure temperature, and time in CARs is accomplished through this parameter. The theory is tested against two negative tone CARs. The first one is EPR, an experimental CAR with known chemistry and the other is SAL-601, a commercial CAR from Shipley.	en
heal.publisher	American Vacuum Society	en
heal.journalName	Journal of Vacuum Science & Technology B	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false