Simulation of surface and line-edge roughness formation in resists

dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Γογγολίδης, Ευάγγελος	el
dc.date.accessioned	2015-05-20T17:01:34Z
dc.date.available	2015-05-20T17:01:34Z
dc.date.issued	2015-05-20
dc.identifier.uri	http://hdl.handle.net/11400/10786
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.sciencedirect.com	en
dc.source	http://www.sciencedirect.com/science/article/pii/S0167931701005470	en
dc.subject	Surface roughness
dc.subject	LER
dc.subject	Applied physics
dc.subject	Τραχύτητα επιφάνειας
dc.subject	Εφαρμοσμένη φυσική
dc.subject	Microelectronics
dc.subject	Μικροηλεκτρονική
dc.title	Simulation of surface and line-edge roughness formation in resists	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1016/S0167-9317(01)00547-0
heal.language	en
heal.access	campus
heal.publicationDate	2001-09
heal.bibliographicCitation	Patsis, G. and Gogolides, E. (2001) Simulation of surface and line-edge roughness formation in resists. "Microelectronic Engineering", 57-58, p.563–569	en
heal.abstract	A molecular-type simulation of surface (SR) and line-edge-roughness (LER) is presented and applied to a negative-tone Chemically Amplified Resist (CAR). The simulator can follow the appearance of SR and LER after each process step and predict the roughness dependence on material properties and process conditions. The simulation results are compared with SR experimental data for a negative-tone chemically amplified epoxy resist.	en
heal.publisher	Elsevier	en
heal.journalName	Microelectronic Engineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false