Theoretical discussion of diffusion effects in negative chemically amplified resists based on contrast curve simulation

dc.contributor.author	Πάτσης, Γεώργιος	el
dc.contributor.author	Meneghini, Giancarlo	en
dc.contributor.author	Γλέζος, Νίκος	el
dc.contributor.author	Αργείτης, Παναγιώτης	el
dc.date.accessioned	2015-05-20T18:14:51Z
dc.date.available	2015-05-20T18:14:51Z
dc.date.issued	2015-05-20
dc.identifier.uri	http://hdl.handle.net/11400/10794
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://scitation.aip.org	en
dc.source	http://scitation.aip.org/content/avs/journal/jvstb/15/6/10.1116/1.589685	en
dc.subject	Diffusion
dc.subject	Negative resistance
dc.subject	Gels
dc.subject	Applied physics
dc.subject	Διάχυση
dc.subject	Αρνητική αντίσταση
dc.subject	Τζελ
dc.subject	Εφαρμοσμένη φυσική
dc.title	Theoretical discussion of diffusion effects in negative chemically amplified resists based on contrast curve simulation	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85042383
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1116/1.589685
heal.language	en
heal.access	campus
heal.publicationDate	1997-08-09
heal.bibliographicCitation	Patsis, G., Meneghini, G., Glezos, N. and Argitis, P. (1997) Theoretical discussion of diffusion effects in negative chemically amplified resists based on contrast curve simulation. "Journal of Vacuum Science & Technology B", 15 (6)	en
heal.abstract	Gel formation theory is discussed in the case of chemically amplified resists (CARs) and a specific epoxy-based resist is used in order to model the results. It is found that existing gel formation models may be classified in four classes and there are two important parameters (inhibitor activity and maximum number of available crosslinkable sites) which must be specially interpreted in order to account for chemical amplification and diffusion mechanisms in CARs. It is also proved that a Charlesby–Pinner representation of the gel-dose relationship reveals qualitative characteristics of the process and composition changes.	en
heal.publisher	American Vacuum Society	en
heal.journalName	Journal of Vacuum Science & Technology B	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false