Study and evaluation of a PCB-MEMS liquid microflow sensor

dc.contributor.author	Πετρόπουλος, Αναστάσιος	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.date.accessioned	2015-05-27T17:10:59Z
dc.date.available	2015-05-27T17:10:59Z
dc.date.issued	2015-05-27
dc.identifier.uri	http://hdl.handle.net/11400/11257
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.mdpi.com/	en
dc.subject	Microelectromechanical system
dc.subject	Thermal conductivity
dc.subject	Temperature
dc.subject	Microflow sensor
dc.subject	Liquid flow measurement
dc.subject	PCB-MEMS
dc.subject	Μικροηλεκτρομηχανικά σύστημα
dc.subject	Θερμοκρασία
dc.subject	Θερμική αγωγιμότητα
dc.subject	Αισθητήρας μικροροής
dc.subject	Μέτρηση ροής υγρών
dc.title	Study and evaluation of a PCB-MEMS liquid microflow sensor	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.identifier.secondary	DOI: 10.3390/s101008981
heal.language	en
heal.access	campus
heal.publicationDate	2010
heal.bibliographicCitation	PETROPOULOS, A. & KALTSAS, G. (2010). Study and evaluation of a PCB-MEMS liquid microflow sensor. Sensors. [online] 10 (10). p. 8981-9001. Available from: http://www.mdpi.com/	en
heal.abstract	This paper presents the evaluation of a miniature liquid microflow sensor, directly integrated on a PCB. The sensor operation is based on the convective heat transfer principle. The heating and sensing elements are thin Pt resistors which are in direct electrical contact with the external copper tracks of the printed circuit board. Due to the low thermal conductivity of the substrate material, a high degree of thermal isolation is obtained which improves the operating characteristics of the device. The sensor is able to operate under both the hot-wire and the calorimetric principle. In order to fully exploit the temperature distribution in the flowing liquid, multiple sensing elements are positioned in various distances from the heater. A special housing was developed which allowed implementation of the sensor into tubes of various cross sectional areas. The sensor sensitivity and measurement range as a function of the sensing element distance were quantified. A minimum resolution of 3 μL/min and a measurement flow range up to 500 μL/min were achieved.	en
heal.publisher	MDPI	en
heal.journalName	Sensors	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true