Multipurpose MEMS thermal sensor based on thermopiles

dc.contributor.author	Randjelović, Danijela V.	en
dc.contributor.author	Πετρόπουλος, Αναστάσιος	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Stojanović, Miloš	en
dc.contributor.author	Lazić, Žarko	en
dc.date.accessioned	2015-05-27T18:35:42Z
dc.date.available	2015-05-27T18:35:42Z
dc.date.issued	2015-05-27
dc.identifier.uri	http://hdl.handle.net/11400/11272
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.elsevier.com/	en
dc.subject	Analytical and FEA modelling
dc.subject	Flow meter
dc.subject	Micromachining
dc.subject	Thermal converter
dc.subject	Thermopile
dc.subject	Vacuum detector
dc.subject	Μετρητής ροής
dc.subject	Μικρομηχανική
dc.subject	Θερμικός μετατροπέας
dc.subject	Θερμοπύλη
dc.subject	Ανιχνευτής κενού
dc.title	Multipurpose MEMS thermal sensor based on thermopiles	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.contributorName	Djurić, Zoran G.	en
heal.contributorName	Matić, Milan J.	en
heal.identifier.secondary	DOI: 10.1016/j.sna.2007.10.043
heal.language	en
heal.access	campus
heal.publicationDate	2008-02-15
heal.bibliographicCitation	RANDJELOVIC, D.V., PETROPOULOS, A., KALTSAS, G., STOJANOVIC, M., LAZIC, Z., et al. (2008). Multipurpose MEMS thermal sensor based on thermopiles. Sensors and Actuators, A: Physical. [online] 141 (2). p. 404-413. Available from: http://www.elsevier.com/[Accessed 23/10/2007]	en
heal.abstract	This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 μm were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.	en
heal.publisher	Elsevier	en
heal.journalName	Sensors and Actuators, A: Physical	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true