Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions

dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Γουστουρίδης, Δημήτριος	el
dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.contributor.author	Τσουκαλάς, Δημήτρης Σ.	el
dc.date.accessioned	2015-05-27T19:22:07Z
dc.date.available	2015-05-27T19:22:07Z
dc.date.issued	2015-05-27
dc.identifier.uri	http://hdl.handle.net/11400/11277
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://iopscience.iop.org/	en
dc.subject	Laminar and turbulent region
dc.subject	Flow system
dc.subject	Sensors
dc.subject	Στρωτή και τυρβώδης περιοχή
dc.subject	Σύστημα ροής
dc.subject	Αισθητήρες
dc.title	Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.identifier.secondary	DOI: 10.1088/1742-6596/10/1/068
heal.language	en
heal.access	campus
heal.publicationDate	2005-01-01
heal.bibliographicCitation	KALTSAS, G., GOUSTOURIDIS, D., NASSIOPOULOU, A.G. & TSOUKALAS, D.S. (2005). Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions. Journal of Physics: Conference Series. [online] 10 (1). p. 277-280. Available from: http://iopscience.iop.org/	en
heal.abstract	A combination of a silicon thermal flow and two capacitive pressure sensors placed in a specially designed housing, is proposed for high sensitivity flow measurements in both laminar and turbulent flows. The system of these sensors can determine the transition point between laminar and turbulent region with sufficient accuracy. The pressure distribution in the flow tube was studied in detail experimentally by using a series of pressure sensors. Analytical and simulation results were extracted for different sensor configurations in the flow system. The influence of the position of the sensor in the flow tube, as well as the pressure profile at the surface of the sensor die, was studied and the optimum conditions were found. Good agreement between experimental results and theory was found.	en
heal.publisher	IOP Publishing	en
heal.journalName	Journal of Physics: Conference Series	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true