Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation

dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Νασιόπουλος, Αθανάσιος Α.	el
dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-02T13:05:42Z
dc.date.issued	2015-06-02
dc.identifier.uri	http://hdl.handle.net/11400/14823
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://ieeexplore.ieee.org/	en
dc.subject	Porous silicon
dc.subject	Silicon thermal gas flow sensor
dc.subject	Thermal isolation
dc.subject	Πορώδες πυρίτιο
dc.subject	Θερμική μόνωση
dc.title	Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.identifier.secondary	DOI: 10.1109/JSEN.2002.806209
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2002
heal.bibliographicCitation	KALTSAS, G., NASSIOPOULOS, A.A. & NASSIOPOULOU, A.G. (2002). Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation. IEEE Sensors Journal. [online] 2 (5). p. 463-475. Available from: http://ieeexplore.ieee.org/	en
heal.abstract	In this paper, the results of full characterization of a micromachined-silicon thermal gas flow sensor will be presented. The sensor is composed of two series of thermocouples on the right and left side of a polysilicon resistor, used as heater. The resistor and the hot contacts of the thermocouples lie on a thick porous silicon layer, which assures local thermal isolation, while the thermopile cold contacts lie on bulk silicon. Gas flow is parallel to the surface of the sensor and perpendicular to the resistor, which is heated at constant temperature. The power of the heater is stabilized by an external circuit, which provides a feedback current to compensate changes in the resistance of the heater under flow. Characterization of the sensor both under static conditions and under flow of different gases will be presented. The sensor shows high sensitivity [of the order of 175 × 10-3 mV/(m/s)1/2 per thermocouple] and very rapid response, below 1 ms, which makes it appropriate for use both under laminar and under turbulent flows.	en
heal.publisher	IEEE	en
heal.journalName	IEEE Sensors Journal	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false