Porous silicon as an effective material for thermal isolation on bulk crystalline silicon

dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.date.accessioned	2015-06-02T13:39:42Z
dc.date.issued	2015-06-02
dc.identifier.uri	http://hdl.handle.net/11400/14835
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.wiley-vch.de/	en
dc.subject	Computer simulation
dc.subject	Thermal isolation
dc.subject	Silicon sensors
dc.subject	Υπολογιστική προσομοίωση
dc.subject	Θερμική μόνωση
dc.subject	Αισθητήρες πυριτίου
dc.title	Porous silicon as an effective material for thermal isolation on bulk crystalline silicon	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85029533
heal.identifier.secondary	DOI: 10.1002/1521-396X(200011)182:1<307::AID-PSSA307>3.0.CO;2-#
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2000-11
heal.bibliographicCitation	NASSIOPOULOU, A.G. & KALTSAS, G. (2000). Porous silicon as an effective material for thermal isolation on bulk crystalline silicon. Physica Status Solidi (A). [online] 182 (1). p. 307-311. Available from: http://www.wiley-vch.de/	en
heal.abstract	Highly porous silicon has been successfully used to create thermally isolated local areas on bulk crystalline silicon, for the fabrication of silicon integrated sensors. Heat distribution and heat transfer have been simulated by using finite element analysis with the ANSYS software. Three cases were compared: the case of bulk crystalline silicon, the case of porous silicon and that of free standing polycrystalline silicon membranes. A flow sensor of the thermal type using porous silicon isolation has been designed and fabricated, showing high sensitivity and rapid response. Its operation principle and main characteristics will be presented.	en
heal.publisher	Wiley-VCH Verlag	en
heal.journalName	Physica Status Solidi (A)	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false