Bulk silicon micromachining using porous silicon sacrificial layers

dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-02T15:05:12Z
dc.date.available	2015-06-02T15:05:12Z
dc.date.issued	2015-06-02
dc.identifier.uri	http://hdl.handle.net/11400/14865
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.elsevier.com/	en
dc.subject	CMOS integrated circuits
dc.subject	Lithography
dc.subject	Porous silicon
dc.subject	CMOS ολοκληρωμένα κυκλώματα
dc.subject	λιθογραφία
dc.subject	πορώδες πυρίτιο
dc.title	Bulk silicon micromachining using porous silicon sacrificial layers	en
heal.type	journalArticle
heal.classification	Science
heal.classification	Physics
heal.classification	Επιστήμη
heal.classification	Φυσική
heal.classificationURI	http://zbw.eu/stw/descriptor/15685-2
heal.classificationURI	http://zbw.eu/stw/descriptor/15669-0
heal.classificationURI	N/A-Επιστήμη
heal.classificationURI	N/A-Φυσική
heal.identifier.secondary	DOI: 10.1016/S0167-9317(96)00209-2
heal.language	en
heal.access	campus
heal.publicationDate	1997-02
heal.bibliographicCitation	KALTSAS, G. & NASSIOPOULOU, A.G. (1997). Bulk silicon micromachining using porous silicon sacrificial layers. Microelectronic Engineering. [online] 35 (1-4). p. 397-400. Available from: http://www.elsevier.com/	en
heal.abstract	A bulk silicon micromachining technique using porous silicon as a sacrificial layer is developed. The proposed process is fully C-MOS compatible and it was successfully used to fabricate deep cavities into silicon with very smooth bottom surfaces and sidewalls. Suspended flat polysilicon membranes were also produced of a surface as large as 230 × 550 μm2, as well as polysilicon cantilevers. This process opens important possibilities in silicon integrated sensor fabrication.	en
heal.publisher	Elsevier	en
heal.journalName	Microelectronic Engineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true