Evaluation of a gas flow sensor implemented on organic substrate

dc.contributor.author	Πετρόπουλος, Α.	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Σπηλιώτης, Τ.	el
dc.contributor.author	Νασσιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-03-18T07:58:45Z
dc.date.available	2015-03-18T07:58:45Z
dc.date.issued	2015-03-18
dc.identifier.uri	http://hdl.handle.net/11400/8101
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://onlinelibrary.wiley.com/doi/10.1002/pssc.200780163/abstract	en
dc.subject	Thermal gas
dc.subject	Θερμική αέριο
dc.subject	Flow sensor
dc.subject	Αισθητήρας ροής
dc.subject	PCB
dc.subject	MEMs technologies
dc.title	Evaluation of a gas flow sensor implemented on organic substrate	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://zbw.eu/stw/descriptor/10470-6
heal.classificationURI	http://zbw.eu/stw/descriptor/10455-2
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1002/pssc.200780163
heal.language	en
heal.access	campus
heal.recordProvider	Τ.Ε.Ι. Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ηλεκτρονικών Μηχανικών Τ.Ε.	el
heal.publicationDate	2008-12
heal.bibliographicCitation	Petropoulos, A., Kaltsas, G., Speliotis, T. and Nassiopoulou, A.G. (2008). Evaluation of a gas flow sensor implemented on organic substrate. Physica Status Solidi 5(12). December 2008. pp. 3839 – 3842. Available from:http://onlinelibrary.wiley.com/doi/10.1002/pssc.200780163/abstract [Accessed 10/10/2008]	en
heal.abstract	In this paper we present results of the evaluation of a thermal gas flow sensor device implemented on a printed circuit board (PCB) substrate by a combination of PCB and MEMs technologies. The device consists of 3 parallel Pt strip resistors in direct electrical contact to patterned copper tracks of the PCB. For planarization purposes, the Pt strips reside on a thick polymer layer (SU8). The central resistor plays the role of a heater and the two other resistors, situated symmetrically on both sides of the heater, are temperature dependent sensing elements. The three main advantages of this specific sensor are: the low thermal conductivity of the substrate materials (FR4 and SU8, with thermal conductivity ∼0.2 W(m·K)) which permits high sensitivity at low power, its robustness compared to suspended membrane sensors and its simple fabrication process. The sensor can operate in both hot wire and calorimetric modes. The sensor was mounted inside a 1.5m long tube with 25 mm2 cross sectional area and was evaluated in nitrogen flow up to 100 SLPM, which corresponds to Reynolds numbers up to 25.000. The sensor signal in both the calorimetric and the hot-wire modes is a monotonous function of the flow rate. A very high sensitivity is obtained in the calorimetric mode at very low flow rates (<0.05SLPM), while the sensor signal in the hot-wire mode appears to be a linear function of the flow rate throughout the entire measurement region. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)	en
heal.journalName	Physica Status Solidi	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false