A thermal vacuum sensor fabricated on plastic substrate

dc.contributor.author	Πετρόπουλος, Α.	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Νασσιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-03-18T08:10:41Z
dc.date.available	2015-03-18T08:10:41Z
dc.date.issued	2015-03-18
dc.identifier.uri	http://hdl.handle.net/11400/8102
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://onlinelibrary.wiley.com/doi/10.1002/pssa.200780162/abstract	el
dc.subject	Thermal vacuum sensor
dc.subject	Θερμικός αισθητήρας κενού
dc.subject	Printed circuit board
dc.subject	Τυπωμένο κύκλωμα
dc.subject	Constant temperature
dc.subject	Σταθερή θερμοκρασία
dc.title	A thermal vacuum sensor fabricated on plastic substrate	en
heal.type	journalArticle
heal.secondaryTitle	study in various operation modes	en
heal.classification	Technology
heal.classification	Electronics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρονική
heal.classificationURI	http://zbw.eu/stw/descriptor/10470-6
heal.classificationURI	http://zbw.eu/stw/descriptor/10455-2
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρονική
heal.identifier.secondary	DOI: 10.1002/pssa.200780162
heal.language	en
heal.access	campus
heal.recordProvider	Τ.Ε.Ι. Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ηλεκτρονικών Μηχανικών Τ.Ε.	el
heal.publicationDate	2008-11
heal.bibliographicCitation	Petropoulos, A., Kaltsas, G. and Nassiopoulou, A.G. (2008). A thermal vacuum sensor fabricated on plastic substrate:study in various operation modes. Physica Status Solidi 205(11). November 2008. pp. 2639 – 2642. Available from:http://onlinelibrary.wiley.com/doi/10.1002/pssa.200780162/abstract [Accessed 26/09/2008]	en
heal.abstract	This work presents the characterization of a thermal vacuum sensor, directly integrated on a printed circuit board (PCB) substrate. The sensor consists of a thin platinum strip, in direct electrical contact with the patterned Cu tracks of the PCB. The platinum resistor that resides on a thick SU-8 layer on the PCB, acts as both heating and temperature sensing element. Both PCB substrate and SU-8 have low thermal conductivity values, therefore ensuring a high degree of thermal isolation. Under electrical current flow through the Pt heater, an elevated temperature field is developed in its vicinity due to Joule heating. The overall heat exchange rate is a function of the surrounding gas pressure in certain pressure regimes due to the contribution of different heat transfer mechanisms. The determination of heat transfer allows for the extraction of the corresponding vacuum value. The sensor operation was tested in a pressure range from 103 to 10–5 mbar for three different operation modes, namely that of constant current (CI), constant temperature (CT) and constant power (CP). (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)	en
heal.journalName	Physica Status Solidi	el
heal.journalType	peer-reviewed
heal.fullTextAvailability	false