Study of electrical properties of silicon nitride film deposited on silicon substrate by dielectric relaxation spectroscopy

dc.contributor.author	Καναπίτσας, Αλέξανδρος Α.	el
dc.contributor.author	Τσώνος, Χρήστος	el
dc.contributor.author	Τριάντης, Δήμος Α.	el
dc.contributor.author	Σταύρακας, Ηλίας	el
dc.contributor.author	Αναστασιάδης, Κίμων	el
dc.date.accessioned	2015-05-01T11:43:51Z
dc.date.issued	2015-05-01
dc.identifier.uri	http://hdl.handle.net/11400/9367
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.emrs-strasbourg.com/	en
dc.title	Study of electrical properties of silicon nitride film deposited on silicon substrate by dielectric relaxation spectroscopy	en
heal.type	conferenceItem
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Physics
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classification	Φυσική
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	http://zbw.eu/stw/descriptor/15669-0
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.classificationURI	N/A-Φυσική
heal.contributorName	Πίσσης, Πολύκαρπος	el
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2009-06
heal.bibliographicCitation	Kanapitsas, A.A., Tsonos, C., Triantis, D.A., Stavrakas, I., Anastasiadis, C., et al. (2009) Study of electrical properties of silicon nitride film deposited on silicon substrate by dielectric relaxation spectroscopy, In: E-MRS 2009, Spring Meeting (Symposium I - Silicon and Germanium issues for future CMOS devices). Strasbourg, France, 8-12 June, 2009. [online]. Abstract 8.11. Available from: http://www.emrs-strasbourg.com/	en
heal.fullTextAvailability	false
heal.conferenceName	E-MRS 2009, Spring Meeting (Symposium I - Silicon and Germanium issues for future CMOS devices)	en
heal.conferenceItemType	poster