Όνομα Περιοδικού:Institute of Physics Conference Series
The lateral extent of the X-ray signal in X-ray microanalysis of thin overlayers is calculated systematically, by using Monte Carlo simulations. Different primary beam energies in the range 20-100keV and different film thicknesses are considered. A Point-Spread-Function composed of two Gaussian curves is determined for each point and the Rayleigh criterion is used in order to calculate the corresponding point-to-point resolution.