Point-to-point resolution in x-ray microanalysis of thin coatings in the energy range 20-100keV

dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.contributor.author	Βαλαμόντες, Ευάγγελος Σ.	el
dc.date.accessioned	2015-05-19T10:03:34Z
dc.date.issued	2015-05-19
dc.identifier.uri	http://hdl.handle.net/11400/10732
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	Microanalysis
dc.subject	Monte Carlo Methods
dc.subject	Thin Films
dc.subject	X ray analysis
dc.subject	Μικροανάλυση
dc.subject	Monte Carlo μέθοδοι
dc.subject	Λεπτές ταινίες
dc.subject	Ανάλυση με ακτίνες Χ
dc.title	Point-to-point resolution in x-ray microanalysis of thin coatings in the energy range 20-100keV	en
heal.type	journalArticle
heal.generalDescription	Microscopy of Semiconducting Materials, 1991. Oxford, Engl. 25-28 March, 1991. Code 17286	en
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.identifier.secondary	ISSN: 09513248
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	1991
heal.bibliographicCitation	NASSIOPOULOU, A.G. & VALAMONTES, E.S. (1991). Point-to-point resolution in x-ray microanalysis of thin coatings in the energy range 20-100keV. Institute of Physics Conference Series. 117. p. 75-78.	en
heal.abstract	The lateral extent of the X-ray signal in X-ray microanalysis of thin overlayers is calculated systematically, by using Monte Carlo simulations. Different primary beam energies in the range 20-100keV and different film thicknesses are considered. A Point-Spread-Function composed of two Gaussian curves is determined for each point and the Rayleigh criterion is used in order to calculate the corresponding point-to-point resolution.	en
heal.journalName	Institute of Physics Conference Series	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	false