Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity

dc.contributor.author	Παγώνης, Δημήτριος-Νικόλαος	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-02T11:25:05Z
dc.date.available	2015-06-02T11:25:05Z
dc.date.issued	2015-06-02
dc.identifier.uri	http://hdl.handle.net/11400/14800
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.iop.org/	en
dc.subject	Surface phenomena
dc.subject	Porosity
dc.subject	Crystalline materials
dc.subject	Επιφανειακά φαινόμενα
dc.subject	Βαθμός πορώδους
dc.subject	Κρυσταλλικά υλικά
dc.title	Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity	en
heal.type	journalArticle
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85105017
heal.identifier.secondary	DOI: 10.1088/0960-1317/14/6/005
heal.language	en
heal.access	campus
heal.publicationDate	2004-06
heal.bibliographicCitation	PAGONIS, D.-N., KALTSAS, G. & NASSIOPOULOU, A.G. (2004). Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity. Journal of Micromechanics and Microengineering. [online] 14 (6). p. 793-797. Available from: http://www.iop.org/	en
heal.abstract	In this work, an integrated thermal gas flow sensor was fabricated and evaluated using a new thermal isolation technique based on a porous silicon membrane over an air cavity in silicon. The fabrication process of a thermal gas flow sensor employing this type of micro-hotplate is described together with the theoretical estimation of the thermal distribution around the heater of the sensor. Experimental results of the thermal isolation achieved are shown. A flow evaluation of the sensor is presented and discussed. All the results obtained are compared with the corresponding ones for an identical sensor using a micro-hotplate made of porous silicon membrane but without the air cavity underneath. The improvement achieved by the air cavity is evaluated.	en
heal.publisher	IOP Publishing	en
heal.journalName	Journal of Micromechanics and Microengineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true