Stabilization of power consumption of the heater of a micromachined silicon gas flow sensor

Νασιόπουλος, Αθανάσιος Α.; Καλτσάς, Γρηγόριος; Νασιοπούλου, Ανδρούλα Γ.

Ημερομηνία Δημοσίευσης: 2001

Τύπος Τεκμηρίου: Δημοσίευση σε συνέδριο

Όνομα Συνεδρίου: 8th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2001

In this paper, an electronic circuit designed to compensate changes in power consumption of the heater of a micromachined silicon gas flow sensor is presented. The sensor is of the thermal type and it uses a polycrystalline silicon resistor on top of a porous silicon area locally formed on the silicon substrate and two thermopiles integrated on both sides of the resistor. Under gas flow the resistance of the heater undergoes small changes, which have to be compensated by a change in the current in order to keep the power constant.

Πηγή: http://ieeexplore.ieee.org/

Θέμα: Technology, Electrical engineering, Τεχνολογία, Ηλεκτρολογία Μηχανολογία

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