Stabilization of power consumption of the heater of a micromachined silicon gas flow sensor

dc.contributor.author	Νασιόπουλος, Αθανάσιος Α.	el
dc.contributor.author	Καλτσάς, Γρηγόριος	el
dc.contributor.author	Νασιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-02T13:28:23Z
dc.date.issued	2015-06-02
dc.identifier.uri	http://hdl.handle.net/11400/14831
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://ieeexplore.ieee.org/	en
dc.subject	Electronic circuits
dc.subject	Aerodynamics
dc.subject	Gas flows
dc.subject	Ηλεκτρονικά κυκλώματα
dc.subject	Αεροδυναμική
dc.subject	Ροές φυσικού αερίου
dc.title	Stabilization of power consumption of the heater of a micromachined silicon gas flow sensor	en
heal.type	conferenceItem
heal.classification	Technology
heal.classification	Electrical engineering
heal.classification	Τεχνολογία
heal.classification	Ηλεκτρολογία Μηχανολογία
heal.classificationURI	http://id.loc.gov/authorities/subjects/sh85133147
heal.classificationURI	http://zbw.eu/stw/descriptor/18426-4
heal.classificationURI	N/A-Τεχνολογία
heal.classificationURI	N/A-Ηλεκτρολογία Μηχανολογία
heal.keywordURI	http://id.loc.gov/authorities/subjects/sh85042279
heal.identifier.secondary	ISBN: 0780370570;978-078037057-9
heal.dateAvailable	10000-01-01
heal.language	en
heal.access	forever
heal.publicationDate	2001
heal.bibliographicCitation	Nassiopoulos, A.A., Kaltsas, G. & Nassiopoulou, A.G. (2001) Stabilization of power consumption of the heater of a micromachined silicon gas flow sensor, In: Proceedings of the 8th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2001. Malta. 2-5 September, 2001. [online] 1. p. 121-124, 957692. Available from: http://ieeexplore.ieee.org/	en
heal.abstract	In this paper, an electronic circuit designed to compensate changes in power consumption of the heater of a micromachined silicon gas flow sensor is presented. The sensor is of the thermal type and it uses a polycrystalline silicon resistor on top of a porous silicon area locally formed on the silicon substrate and two thermopiles integrated on both sides of the resistor. Under gas flow the resistance of the heater undergoes small changes, which have to be compensated by a change in the current in order to keep the power constant.	en
heal.publisher	IEEE	en
heal.fullTextAvailability	false
heal.conferenceName	8th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2001	en
heal.conferenceItemType	poster