Formation of confined macroporous silicon membranes on pre-defined areas on the Si substrate

dc.contributor.author	Παγώνης, Δημήτριος-Νικόλαος	el
dc.contributor.author	Νασσιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-03T15:35:07Z
dc.date.available	2015-06-03T15:35:07Z
dc.date.issued	2015-06-03
dc.identifier.uri	http://hdl.handle.net/11400/14957
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.scopus.com/record/display.url?origin=recordpage&eid=2-s2.0-34547140853&citeCnt=3&noHighlight=false&sort=plf-f&src=s&sid=13163B668AF7FCBFE1B88E8B657F8A6C.53bsOu7mi7A1NSY7fPJf1g%3a4500&sot=autdocs&sdt=autdocs&sl=17&s=AU-ID%286602623949%29&relpos=9	en
dc.subject	Μακροπορώδεις μεμβράνες πυριτίου
dc.subject	Κολλητική τεχνολογία
dc.subject	Μεσοπορώδες στρώμα
dc.subject	Λιθογραφία
dc.subject	Μεμβράνες
dc.subject	Macroporous silicon membranes
dc.subject	Masking technology
dc.subject	Mesoporous layer
dc.subject	Lithography
dc.subject	Membranes
dc.title	Formation of confined macroporous silicon membranes on pre-defined areas on the Si substrate	en
heal.type	journalArticle
heal.classification	Φυσική
heal.classification	Ηλεκτρολογική μηχανική
heal.classification	Physics
heal.classification	Electrical engineering
heal.classificationURI	N/A-Φυσική
heal.classificationURI	N/A-Ηλεκτρολογική μηχανική
heal.classificationURI	http://skos.um.es/unescothes/C02994
heal.classificationURI	http://skos.um.es/unescothes/C01311
heal.identifier.secondary	DOI: 10.1002/pssa.200674328
heal.language	en
heal.access	campus
heal.recordProvider	Τεχνολογικό Εκπαιδευτικό Ίδρυμα Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ναυπηγών Μηχανικών Τ.Ε.	el
heal.publicationDate	2007-05
heal.bibliographicCitation	Pagonis, D.N. and Nassiopoulou, A.G. (2007) Formation of confined macroporous silicon membranes on pre-defined areas on the Si substrate. Physica Status Solidi (A) Applications and Materials Science. [Online] 204 (5), pp.1335-1339. Available from: http://www.scopus.com [Accessed 03/06/2015]	en
heal.abstract	In this work we investigated the formation of confined macroporous silicon membranes on pre-defined areas on the silicon substrate. Two different cases were considered: a) membranes supported by the silicon substrate and b) membranes suspended over a cavity on Si. The confined areas were defined lithographically and porous silicon formation took place at mask openings. The main difficulty to overcome was to avoid trenching and silicon over-etching at mask borders, related with the masking technology used. An appropriate masking technology was developed and used to fabricate a) single macroporous and b) bilayers of macroporous over mesoporous silicon. In the second case, by selectively removing the mesoporous layer, suspended confined macroporous silicon membranes over a cavity on the silicon substrate were fabricated.	en
heal.journalName	Physica Status Solidi (A) Applications and Materials Science	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true