Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications

dc.contributor.author	Παγώνης, Δημήτριος-Νικόλαος	el
dc.contributor.author	Νασσιοπούλου, Ανδρούλα Γ.	el
dc.date.accessioned	2015-06-03T16:07:03Z
dc.date.available	2015-06-03T16:07:03Z
dc.date.issued	2015-06-03
dc.identifier.uri	http://hdl.handle.net/11400/14970
dc.rights	Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.source	http://www.scopus.com/record/display.url?origin=recordpage&eid=2-s2.0-33646019271&citeCnt=3&noHighlight=false&sort=plf-f&src=s&sid=13163B668AF7FCBFE1B88E8B657F8A6C.53bsOu7mi7A1NSY7fPJf1g%3a4500&sot=autdocs&sdt=autdocs&sl=17&s=AU-ID%286602623949%29&relpos=11	en
dc.subject	Ανοδική οξείδωση
dc.subject	Σύνθετη μικρομηχανική
dc.subject	Διάλυση
dc.subject	Ηλεκτροχημεία
dc.subject	Διήθηση
dc.title	Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications	en
heal.type	journalArticle
heal.classification	Ηλεκτρονική
heal.classification	Χημεία
heal.classification	Electronics
heal.classification	Chemistry
heal.classificationURI	N/A-Ηλεκτρονική
heal.classificationURI	N/A-Χημεία
heal.classificationURI	http://zbw.eu/stw/descriptor/10455-2
heal.classificationURI	http://skos.um.es/unescothes/C00568
heal.identifier.secondary	DOI: 10.1016/j.mee.2006.01.065
heal.language	en
heal.access	campus
heal.recordProvider	Τεχνολογικό Εκπαιδευτικό Ίδρυμα Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ναυπηγών Μηχανικών Τ.Ε.	el
heal.publicationDate	2006-04
heal.bibliographicCitation	Pagonis, D.N. and Nassiopoulou, A.G (2006) Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications. Microelectronic Engineering. [Online] 83 (4-9), pp.1421-1425. Available from: http://www.scopus.com [Accessed 03/06/2015]	en
heal.abstract	This work presents a new electrochemical process for the formation of free-standing macroporous silicon membranes over a large cavity. The developed technique is based on a two-step electrochemical process of silicon dissolution, starting from thick macroPS membrane formation under the appropriate conditions and continuing with different anodization conditions that lead to formation of a nanoporous silicon layer underneath the macroporous membrane. The obtained structure is a double-layer of a macroporous over a nanoporous layer. By selective dissolution of the nanoporous layer, a free-standing macroporous silicon membrane over a large cavity in silicon is obtained. Interesting applications of this micromechanical structure include particle filtering and lab-on-chip devices.	en
heal.publisher	Elsevier	en
heal.journalName	Microelectronic Engineering	en
heal.journalType	peer-reviewed
heal.fullTextAvailability	true